Recent Progresses on the Stability of Hydrogenated Amorphous Silicon Thin Films

LIAO Naiman,LI Wei,JIANG Yadong,KUANG Yuejun,LI Shibin,WU Zhiming
2007-01-01
Abstract:The a-Si∶H thin film is an important light-sensitive material that has received significant attention nowadays because of its unique properties. The stability of this thin film is a key factor which is fatal in the application of commercial devices. This paper summarizes and commends some researches on the stability of a-Si∶H thin films based on recent literature, and discusses the relationship between the weak bonding of Si-Si and the stability of the films. It introduces the mechanisms of light-induced degeneration of a-Si∶H thin films and also recommends some methods of film fabrication and post-treatment techniques in order to reduce the weak bonding of Si-Si in a-Si∶H thin films.
What problem does this paper attempt to address?