Quantification of Characteristic Parameters for the Dissociation Kinetics of Iron–boron Pairs in Czochralski Silicon

Xiaodong Zhu,Xuegong Yu,Xiaoqiang Li,Peng Wang,Deren Yang
DOI: https://doi.org/10.1016/j.scriptamat.2010.10.021
IF: 6.302
2010-01-01
Scripta Materialia
Abstract:We have developed a new process to quantify the dissociation kinetics of iron boron (FeB) pairs in Czochralski silicon. It is based on determining the characteristic parameters for the association kinetics of FeB pairs by low-temperature thermal activation experiments. The dissociation rates can then be derived from the equilibrium concentration and association rates of FeB pairs at elevated temperatures. Our results show an activation energy of 1.20 eV and an attempt frequency of 9 x 1012 for FeB dissociation. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
What problem does this paper attempt to address?