Experimental investigation on lubrication behavior of Ti/TiN/TiC/DLC solid film

LI Ming,WANG Feng,LIN Zeng,BA De-chun
DOI: https://doi.org/10.3969/j.issn.1002-0322.2007.05.005
IF: 4
2007-01-01
Vacuum
Abstract:A new kind of composite solid film lubricants were developed, and their structures especially how they work are discussed. Basically they were a composite of the conventional hard coatings TiN and TiC, and the top layer is a diamond like carbon(DLC) deposited via radio frequency plasma enhanced chemical vapor deposition(RFPECVD). The microstructure and morphology of the film were studied by UV-Raman spectroscopy and SEM, respectively, and the pin-on-disk tribometer was used to test the friction properties of the films. The result showed that the film prepared in this way is DLC, and a big amount of sp2is contained in its surface to serve efficiently the lubrication function to which the transfer layer resulting from friction is also beneficial.
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