Influence of Aluminum Ions Implanted on Oxidation Behavior of ZIRLO Alloy at 500 °C

DQ Peng,XD Bai,F Pan,H Sun,BS Chen
DOI: https://doi.org/10.1016/j.vacuum.2005.08.026
IF: 4
2006-01-01
Vacuum
Abstract:The beneficial effect of aluminum ion implantation on the oxidation behavior of ZIRLO alloy at 500°C has been studied. ZIRLO alloy specimens were implanted with aluminum ions with fluence range from 1×1016 to 1×1018ion/cm2, using a MEVVA source at an extraction voltage of 40kV at maximum temperature of 380°C. The weight gain curves were measured after being oxidized in the air at 500°C for 120min, which showed that a significant improvement was achieved in the oxidation behavior of ZIRLO alloy implanted with aluminum compared with that of the virgin ZIRLO alloy. It has been obviously found that when the fluence is 1×1018ion/cm2, the oxidization of the implanted ZIRLO alloy is reduced into 30% of the virgin ZIRLO alloy.
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