Modeling of Acid Copper Anisotropic Deposition Based on Detailed Calculation of the Electrolyte Composition

Bang-Hao Wu,Chi-Chao Wan,Yung-Yun Wang
DOI: https://doi.org/10.1149/1.1522385
IF: 3.9
2003-01-01
Journal of The Electrochemical Society
Abstract:A multi-ion deposition model, based on constant applied voltage, was used to calculate the current distribution for anisotropic deposition in electrolyte composed of CuSO4 and H2SO4. The bulk species concentration was calculated by Pitzer's model, including consideration of partially dissociated CuSO4(aq) and HSO4-. It was found, in some cases with high H2SO4 concentration, that the dissociation of CuSO4(aq) was higher than in the pure CuSO4 solution because of excess H+ ions. Further deposition modeling shows that H2SO4 and CuSO4 play different roles in anisotropic deposition. High H2SO4 concentration improves deposition uniformity but suppresses the filling ability. However, CuSO4 plays a role inverse to that of H2SO4. A moderate electrolyte composition for anisotropic deposition is thus suggested to be 0.1-0.3 M CuSO4 and 0.6-1 M H2SO4. (C) 2002 The Electrochemical Society.
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