Effects of Substrate Rotation on the Microstructure of Metal Sheet Fabricated by Electron Beam Physical Vapor Deposition

Yue Sun,Xiu Lin,Xiaodong He,Jiazhen Zhang,Mingwei Li,Guangping Song,Xinyan Li,Yijie Zhao
DOI: https://doi.org/10.1016/j.apsusc.2009.01.013
IF: 6.7
2009-01-01
Applied Surface Science
Abstract:The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.
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