Effects of Different Alcohols on Texture Properties of Monocrystalline Silicon

QU Sheng,ZHANG Xingwang,MAO Hehuang,YU Yinxiang,HAN Zenghua,TANG Yehua,ZHOU Chunlan,WANG Wenjing

2011-01-01

Abstract:Monohydroxy alcohols(ethanol and isopropanol) and dihydroxy alcohols(ethanediol and propanediol) were used as additives during monocrystalline silicon wafers texturing,and their effects on texturing were investigated.Experimental results show that,monohydroxy alcohols(MA) reduce reactive rate,while dihydroxy alcohols(DA) increase reactive rate,resulting in reduced texturing time.And DA less volatilize due to their higher boiling point,resulting in reduced chemical consumption and lower cost,however,their abilities removing the hydrogen bubble away from silicon wafer surface are weaker than MA,therefore higher initial concentration are indispensable during texturing.Scanning electron microscopy(SEM) results indicate that MA trends to make pyramids more uniform,while DA leads to more non-uniform pyramids.Reflectivity measurements indicate that DA leads to lower wafer surface reflectivity than MA.