Abstract:This study demonstrates the magnetostatic torsional actuator consisting in a Si-Ni compound frame to significantly improve the driving force. The present design has three merits: (1) it employs a Si mold to simultaneously electroplate/pattern thick Ni, and the Ni and Si structures respectively provide magnetostatic force and superior mechanical properties, (2) the embedded Ni structures not only increase the ferromagnetic material volume but also enhance magnetization strength to enlarge magnetostatic torque, (3) the Si-Ni compound structure, which is nearly symmetric about the torsional axis in the out-of-plane direction, can decrease the moment of inertia and also reduce the wobble motion. In applications, one-axis torsional actuator is implemented and characterized. The experiments show that the Si-Ni compound scanner has an optical scan angle theta(optical) = 90 degrees with the input power 81 mW. The input power is decreased as compared with the existing scanner. Moreover, the out-of-plane wobble motion is only 44 nm at theta(optical) = 15 degrees. Compared with the existing designs consisted of asymmetric structures in the out-of-plane direction, such as electroplated film and silicon rib, about the torsional axis, the equivalent eccentric force is reduced nearly two-fold. In short, the proposed design not only increases the driving force but also decreases the wobble motion.

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