The Double-Side Electroplating and Slender Ferromagnetic Patterns Torque-Enhancement Design for Magnetostatic Actuator

Tsung-Lin Tang,Chia-Pao Hsu,Wen-Chien Chen,Weileun Fang
DOI: https://doi.org/10.1109/sensor.2009.5285842
2009-01-01
Abstract:This study demonstrates the torque-enhancement design for magnetostatic actuators driven by double-side electroplating ferromagnetic film. The present design has two merits: (1) the backside electroplating of the ferromagnetic film increases the magnetostatic torque, (2) the slender ferromagnetic material patterns with higher length-to-width ratio enhance the magnetostatic torque. The actuator is implemented on SOI wafer, and the process also has two merits, (1) the device-layer act as the cathode to enable simultaneous double-side electroplating, (2) the handle-layer is exploited as the shadow mask to pattern the seedlayer at backside wafer. In applications, a scanner were implemented and characterized. Measurements show a 149% torque enhancement from double-side electroplating design. The vertical slender ferromagnetic material patterns further increase the magnetostatic torque to 211%.
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