Ferroelectric SrxBa1-xNb2O6 optical waveguiding thin films on SiO2-coated Si(100) substrates

S.B. Xiong,Z.M. Ye,X.Y. Chen,X.L. Guo,S.N. Zhu,Z.G. Liu,C.Y. Lin,Y.S. Jin
DOI: https://doi.org/10.1007/s003390050776
1998-01-01
Applied Physics A
Abstract:x Ba 1-x Nb 2 O 6 (x=0.5) films (abbreviated as SBN:0.5) on SiO 2 -coated Si substrates are potential components for the application of integrated electro-optics devices. SBN:0.5 optical waveguiding thin films on SiO 2 -coated Si substrates with a very thin MgO diffusion buffer have been successfully prepared by pulsed laser deposition. The as-grown films have a refractive index of 2.28, which is close to that of bulk SBN. X-ray analysis showed that the as-grown films have a single-phase tetragonal tungsten bronze structure. The SBN:0.5 thin films prepared by PLD exhibit favorable ferroelectric and optical waveguiding properties. The composition and the morphology of the films were also examined by XPS and by SEM, respectively. Ferroelectric SBN:0.5 optical waveguiding thin films on SiO 2 -coated Si substrates are expected to be used in integrated electro-optic devices.
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