Abstract:High entropy alloy nitride coatings (HEAN), showing superior mechanical strength, high oxidation resistance, and thermal stability, have often been used in protective hard coatings field. However, the high temperature tribological field of novel HEA nitride films has not yet been well studied. The correlations among tribological properties, compressive residual stress, mechanical properties, and self-lubricating oxide are still limited.In this research, the novel (AlCrNbSiTiMo)N coatings were fabricated on both Inconel-718 and Si (100) substrate by radio frequency (RF) magnetron sputtering via tuning both substrate bias at 300 °C deposition temperature. The (AlCrNbSiTiMo)N coatings with a specific substrate bias exhibit an outstanding hardness of 34.5±0.8 GPa.In the wear test at 700 °C, the films deposited at −100 V revealed the lowest wear rate around 1.2 × 10−6 mm3N−1 m−1. With Molybdenum doping, the MoO3 Magnéli phase was observed on the surface at elevated temperature wearing process, and the friction coefficient at high temperature decreased significantly due to a lubricating surface. The coating exhibited the average friction coefficient value of 0.48 in the wear test of 700 °C. The high temperature tribological performance was addressed and related to the mechanical properties, the plastic deformation resistance H3/E2, and the excess residual stress of the films.This study provides a new design for hard coatings applied to severe wearing conditions. By tuning substrate bias, the (AlCrNbSiTiMo)N coatings exhibit outstanding mechanical and tribological characteristics, which will be a promising candidate for high temperature tribological protective film.

Tribological Behavior of Hard W/NbN Superlattice Films

Tribological Properties of Ta‐C‐N and Ta‐N Thin Films

Microstructure, mechanical and tribological properties of CrN/W2N multilayer films deposited by DC magnetron sputtering

Comparison in Mechanical and Tribological Properties of Cr–W–N and Cr–Mo–N Multilayer Films Deposited by DC Reactive Magnetron Sputtering

Mechanical and Tribological Properties of Laminated (NbTaMoW)Nx Films

Tribological and mechanical behaviors of TiN/CNx multilayer films deposited by magnetron sputtering

Structural and Mechanical Properties of TaN/a-CNx Multilayer Films

Microstructures, Mechanical Properties and Tribological Behaviors of NiAl-based Composite Coatings with Various Addition of Nb

Electronic structure and mechanical properties of hard coatings from the chromium–tungsten nitride system

Effect of modulation period on the mechanical and tribological behavior of (CrNbTiAlV)CN/MoN coatings

Tribological and Micromechanical Properties of the Nanostructured Carbonitride/Nitride Coatings of Transition Metals Alloyed by Hf and Nb

The influence of WS2 layer thickness on microstructures and mechanical behavior of high-entropy (AlCrTiZrNb)N/WS2 nanomultilayered films

Mechanical properties of hard chromium tungsten nitride coatings

Microstructure and Wear Behavior of Hard Ni60 and Soft WC-12Co/N125 Coatings Prepared by Laser Cladding on W1813N Non-magnetic Stainless Steel

Structure and Wear Behavior of AlCrSiN-based Coatings

Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias

Microstructure and Tribological Behavior of BCN Thin Films with Different Nitrogen Contents

Structural And Tribological Characteristics Of Carbon Nitride Films Deposited By The Reactive Ionized-Cluster Beam Technique

Microstructure and Wear Behavior of Hard Ni60 and Soft WC-12Co/Ni25 Coatings Prepared by Laser Cladding on W1813N Non-magnetic Stainless Steel

Tribological behavior of nanotwinned TiBN coatings

Growth, mechanical properties, and tribological performance of TiAlN/NbN and NbN/TiAlN bilayer coatings