Abstract:Langmuir probe techniques have been used to study time and spatially resolved electron densities and electron temperatures in pulse-modulated hydrogen discharges in two different planar microwave reactors (fmicrowave= 2.45 GHz, tpulse= 1 ms). The reactors are (i) a standing-wave radiative slotted waveguide reactor and (ii) a modified travelling-wave radiative slotted waveguide reactor, which generate relatively large plasmas over areas from about 350 cm^2 to 500 cm^2. The plasma properties of these reactor types are of particular interest as they have been used for basic research and for plasma processing, e.g. for surface treatment and layer deposition. In the present study the pressures and microwave powers in the reactors were varied between 33 and 55 Pa and 600 and 3600 W, respectively. In regions with high electromagnetic fields shielded Langmuir probes were used to avoid disturbances of the probe characteristic. Close to the microwave windows of the reactors both the electron density and the electron temperature showed strong inhomogeneities. In the standing-wave reactor the inhomogeneity was found to be spatially modulated by the position of the slots. The maximum value of the electron temperature was about 10 eV and the electron density varied between 0.2 and 14*10^11 cm^-3. The steady state electron temperature in a discharge pulse was reached within a few tens of microseconds whereas the electron density needed some hundreds of microseconds to reach a steady state. Depending on the reactor the electron density reached a maximum between 80 and 200 microseconds after the beginning of the pulse.

Characteristics of Langmuir Probe in Low Temperature, Weakly Magnetized Plasmas

New Experimental Results Obtained using Microwave Reflectometry in HL-2 A Tokamak

Observation of Turbulence Energy Transfer in a Cylindrical Laboratory Plasma Device

Langmuir Probe Diagnosis of a Cold Atmospheric Plasma Jet

Sampling of Plasma Plume from Atmosphere into Vacuum for Reliable Langmuir Probe Diagnostics

Langmuir probe characteristics in a positive-ion/negative-ion plasma

Theoretical and Experimental Study of the Microwave Cut-off Probe for Electron Density Measurements in Low-Temperature Plasmas

Spherical Langmuir probes in magnetized plasma. A model based on particle-in-cell simulations

Experimental Evaluation of Langmuir Probe Sheath Potential Coefficient on the HL-2A Tokamak

The Penetrated and Scattered Field Distributions in the Presence of a Non-Uniform Cold Magnetised Plasma Column Surrounded By Multiple Strips: Tm Wave Incidence

Electron density measurements in low-pressure plasmas using cutoff probes and comparison with hairpin and Langmuir probes

Comparative studies of cold/hot probe techniques for accurate plasma measurements

Improved analysis techniques for cylindrical and spherical double probes

Identification of Low-Frequency Zonal Flow in A Linear Magnetic Plasma Device

LOW TEMPERATURE PLASMA PROBE AND METHODS OF USE THEREOF

Research on Low Pressure Electronic Density Diagnostic Method of Single Paperback Probe Based on Langmuir Probe Theory

Plasma probe characteristics in low density hydrogen pulsed plasmas

Development of the Langmuir probe under q -distribution for NCST

Study of plasma parameters in high enthalpy ICP-heated wind tunnel by using single Langmuir probe

Langmuir-probe measurement through the plasma grid aperture of hydrogen negative ion source

Langmuir probe diagnostic studies of pulsed hydrogen plasmas in planar microwave reactors