Abstract:Abstract Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m s −1 in its initial 500 μ m displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation (LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.

Laser Thinning and Trimming of Films in Vacuum

Laser Frequency Trimming of Quartz Crystal Oscillators

Infrared Pulsed Picosecond Laser-Induced Plasma-Assisted Ablation of Micro-textures on Quartz Surface

A Low Diffraction Laser Beam As Applied to Polymer Ablation

Laser Frequency Trimming Technology Based on FBAR

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Femtosecond Laser Single-pass High Quality Direct Cutting Thin Quartz Glass Process Based on Filament Effect

Experimental Investigation of Polymeric Material Removal by Low Diffraction Laser Beam

Processing Microstructure on Film by Femtosecond Laser

The Study of Film Thickness Measurement by Laser Induced Fluorescence

Laser-induced microjet-assisted ablation for high-quality microfabrication

Transparent superhydrophobic glass prepared by laser-induced plasma-assisted ablation on the surface

In-situ, variable thickness, liquid crystal film target inserter for moderate repetition rate intense laser applications

Trimming for Alumina-Based Ceramic Casting Cores for Turbine Blade by Double Picosecond Laser Scanning

Thermal regime and effect studying on the ablation process of thin films prepared by nanosecond pulsed laser

Effect of film properties on the material removing characteristics in femtosecond laser rear-side ablation of chromium film

Selective Removal of Variable Thickness Multilayer Materials Based on Photoelectric Detection

Thickness evaluations for thin coatings using laser scanning thermography

Micromachining of Au Film by Femtosecond Pulse Laser

Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser

Size Control of Vapor Bubbles on a Silver Film by a Tuned CW Laser