Abstract:In this work, diamond-like carbon (DLC) films were deposited on stainless steel substrates with Si/SiC intermediate layers by combining plasma enhanced sputtering physical vapour deposition (PEUMS-PVD) and microwave electron cyclotron resonance plasma enhanced chemical vapour deposition (MW-ECRPECVD) techniques. The influence of substrate negative self-bias voltage and Si target power on the structure and nano-mechanical behaviour of the DLC films were investigated by Raman spectroscopy, nano-indentation, and the film structural morphology by atomic force microscopy (AFM). With the increase of deposition bias voltage, the G band shifted to higher wave-number and the integrated intensity ratio I(D)/I(G) increased. We considered these as evidences for the development of graphitization in the films. As the substrate negative self-bias voltage increased, particle bombardment function was enhanced and the sp(3)-bond carbon density reducing, resulted in the peak values of hardness (H) and elastic modulus (E). Silicon addition promoted the formation of sp(3) bonding and reduced the hardness. The incorporated Si atoms substituted Sp(2)- bond carbon atoms in ring structures, which promoted the formation of sp(3)-bond. The structural transition from C-C to C-Si bonds resulted in relaxation of the residual stress which led to the decrease of internal stress and hardness. The results of AFM indicated that the films was dense and homogeneous, the roughness of the films was decreased due to the increase of substrate negative self-bias voltage and the Si target power.

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Diamond-like Carbon (DLC) Films Deposited on Copper Substrate Through Preparation of Intermediate Layers

Studies of Diamond-Like Carbon (DLC) Films Deposited on Stainless Steel Substrate with Si/SiC Intermediate Layers

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Investigation on Diamond-like Carbon Films Prepared by RF Magnetron Reactive Sputtering

Preparation of Graded DLC Film on TiNi SMA by Plasma Enhanced Deposition and Behavior of Corrosion-Resistance

Preparation and Thermal Characterization of Diamond-Like Carbon Films

Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation on Si

Preparation and Characterization of Multilayered Titanium/titanium-Diamond-like Carbon Films

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Structure and Topographies of Diamond-Like Carbon Films Produced on Tungsten Pre-Implanted Stainless Steel Substrate by Plasma Immersion Ion Implantation and Deposition

Evaluation of Diamond-Like Carbon Films Electrodeposited on an Al Substrate from the Liquid Phase with Pulse-Modulated Power

Growth Feature of Diamond-Like Carbon Films by Various Vacuum Plasma Methods

Synthesis and Tribological Properties of Diamond-Like Carbon Films by Electrochemical Anode Deposition

Surface morphology of diamond-like carbon films prepared by liquid deposition