Abstract:Heteroepitaxial thin films are subjected to very large stresses, typically in the giga-Pascal range, due to lattice mismatch. Their applications in microelectronic devices have drawn a growing research effort which involves, in part, a better understanding of the processes by which defects such as cracks and dislocations are nucleated in a thin layer structure. One of the possible defect mechanisms is related to a stress-induced morphological instability which tends to roughen the film surface by mass diffusion during film growth or annealing. A major objective of this paper is to show that a few invariance properties of the strain energy density and the chemical potential in a heteroepitaxial structure can be utilized to obtain some valuable information concerning the equilibrium profile, the stress concentration and the formation of cusp-like stress singularities without having to resort to full-scale numerical studies. The process of cusp-formation requires a critical film thickness Hcr which is independent of the Matthews critical thickness herfor misfit dislocation formation by propagation of threading dislocations within the film. Calculations show that Hcr is significantly larger than hcr for a wide range of misfit strain, suggesting that nucleation of threading dislocations via cusp-formation could be critical in the overall process of strain relaxation in this type of film. Finally, a “phase” diagram is constructed to categorize important consequences of the surface evolution based on the instability wavelength and average film thickness.

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Effect of residual surface tension on the stress concentration around a nanosized spheroidal cavity

Some general properties of stress-driven surface evolution in a heteroepitaxial thin film structure

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Computer Simulation of Quantum Dot Surface under Stress

Diffractions of Elastic Waves and Stress Concentration Near a Cylindrical Nano-Inclusion Incorporating Surface Effect

Stress-Analysis Of Holes In Anisotropic Elastic Solids - Conformal Mapping And Boundary Perturbation

Cusp-like Flaws along a Rough Surface

Large deformation and instability of soft hollow cylinder with surface effects

On the Bending of Unconstrained Thin Crystalline Plates Caused by the Change in Surface Stress

Line Stress of Step Edges at Crystal Surfaces

Effects of Surface Stresses on Contact Problems at Nanoscale

Stress Concentration Tensors of Inhomogeneities with Interface Effects

On Surface Waves in a Finitely Deformed Coated Half-Space

Variation of Elastic T-stresses along Slightly Wavy 3D Crack Fronts

Dynamic stress concentrations in a plate with cylindrical cavity by incident P wave

A Numerical Study of Stress Controlled Surface Diffusion During Epitaxial Film Growth

Stress and Displacement Fields in the Surface of an Elastic Half-Space under the Action of a Constant Shear Load over a Circular Contact Domain