SIMS study of oxygen spiral diffusion in c-textured YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub>/SrTiO<sub>3</sub>epitaxial thin film

Cai Zhen,Jin Xue-jun
DOI: https://doi.org/10.1088/1004-423X/7/12/005
1998-01-01
Acta Physica Sinica (Overseas Edition)
Abstract:Secondary ion mass spectroscopy was used to study the chemical diffusivity of O18 in c-textured YBa2Cu3O7-δ/SrTiO3 epitaxial thin film. By fitting experimental data to the one-dimensional curve, the apparent diffusivity along the c-axis was obtained to be equal to 1.02×10-14 cm2/sec when the temperature was 350°C. A computer analysis method was put forward to calculate the spiral diffusion process, and the diffusivity anisotopy of films with different mosaic size obtained. For a film of 7000 × 7000A2 mosaic size, Dab* was found to be similar 3.55 × 10-5×exp((-1.03ev)/kT)cm2/sec. The calculated results reveal that the variation of the results of Dc is not the result of diffusivity anisotropy but of the difference in mosaic size.
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