Synthesis of Highly Oriented K(Ta,Nb)O3 (ta:Nb = 65:35) Film Using Metal Alkoxides

T YOGO,K KIKUTA,Y ITO,S HIRANO
DOI: https://doi.org/10.1111/j.1151-2916.1995.tb08632.x
1995-01-01
ChemInform
Abstract:Highly oriented K(Ta,Nb)O3 (Ta:Nb = 65:35) (KTN) thin films of perovskite structure were synthesized successfully on Pt(100)/MgO(100) substrates from a metal alkoxide solution through reaction control. Homogeneous KTN coating solutions prepared from KOC2H5, Ta(OC2H5)5, and Nb(OC2H5)5 in ethanol were analyzed by 1H, 13C, and 93Nb NMR spectroscopy. The KTN precursor included a molecular‐level mixture of K[M(OC2H5)6] (M = Ta, Nb) units interacting in ethanol solution. X‐ray pole figure measurement showed that perovskite KTN films crystallized on Pt(100)/MgO(100) substrates had not only a (100) orientation but also a three‐dimensional regularity of grains. The remanent polarization and coercive field of the KTN film (thickness, 1.0 μm) crystallized at 700°C were 1.5 μC/cm2 and 8.7 kV/cm, respectively, at 225 K.
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