Abstract:Nitrogen-rich ultra-thin (1-2 nm thick) layers in diamond produced by high-temperature nitrogen ion (N2+) implantation at low N2+ energies studied by in situ x-ray photoelectron spectroscopy are reported. Nitrogen bonding at the subsurface region and its thermal stability, as well as structural defects in polycrystalline diamond (PCD) implanted with 200, 500, and 800 eV N2+ at room temperature (RT) and 600 °C at an ion dose of 4.5 × 1014 ions/cm2, are investigated. Implantation at RT leads to nitrogen bonding at interstitial and substitutional sites in the diamond lattice, which is associated with the C-N/C=N bond, lower intensity of the C≡N (nitrile-like) component associated with nitrogen bonding with carbon defects, and quaternary nitrogen. The relative composition of these chemical states varies with implantation energy, temperature, and post-implantation annealing temperature. Upon annealing the RT implanted layers above 500-600 °C, the interstitial nitrogen converts to substitutional nitrogen. This process competes with nitrogen desorption. The thermal stability of nitrogen increases with implantation energy. Implantation at 600 °C at 800 eV resulted in a significantly lower concentration of nitrile-like bonds and a lower density of structural defects compared to RT implantation at the same energy. These effects are associated with dynamic annealing, which becomes more significant at higher implantation energies. Upon high-temperature implantation, nitrogen mostly populates directly substitutional sites. Nitrogen implantation at low energy and high temperature may be a viable way to nitride diamond surfaces with reduced density of defects where nitrogen is selectively bonded to substitutional sites. Finally, a comparison between nitrogen implantation into PCD and Diamond (100) [Di(100)] surfaces is presented.

Structural transformation induced by nitrogen implantation in thin metal films

Formation of Metal Nitrides by Nitrogen Implantation

Formation Of Noble-Metal Nitrides By Nitrogen Implantation

Structure and Wear Behavior of Nitrogen-Implanted Aluminum Alloys*

Composition and structure of Ti-6Al-4V alloy plasma-based ion implanted with nitrogen

Structural, Optical and Half-Metallic Properties of Mn and As Co-Implanted ZnO Thin Films

Study of surface modification of metal ion-implanted with TiN

Phase formation and modification of corrosion property of nitrogen implanted Ti–Al–V alloy

XPS investigation of nitrogen ions implanted into aluminum alloy by plasma based ion implantation

Phase Formation and Corrosion Behavior of Nitrogen Implanted Zr–Sn–Nb Alloy in Alkaline Environment

Surface Characteristics and Oxidation Behavior of Nitrogen Ion-Implanted Zr–Sn–Nb Alloy

Structural Correlation In Tantalum Nitride Formation By Direct Nitrogen Implantation

Study of Precipitation and Dislocations in Nitrogen Implanted Zircaloy-4

Grazing-incidence X-ray Scattering and Diffraction Study of the Nitrogen Ion Implantation Layer Produced by Plasma-Based Ion Implantation

Structural evolution of amorphous and nanocrystalline TiAl films under helium implantation

Microstructure in Implanted Layer of 1cr18ni9 Steel Implanted at Elevated Temperature

Dynamic annealing assisted near-surface structural and bond stabilization in high-temperature low-energy N2+ implanted diamond

Surface Characterization of a Ti–2Al–2.5Zr Alloy by Nitrogen Ion Implantation

Phase Formation in Nitrogen Ion Implanted Ti–Al–Zr Alloy and Modification of Corrosion Property

The influence of nitrogen ion implantation on the microstructure and chemical composition of a thin layer on the biodegradable Zn-0.8Mg-0.2Sr substrate

The effect of N+-implanted aluminum substrate on the mechanical properties of TiN films