Study of surface modification of metal ion-implanted with TiN

Qiang Yinghuai
Abstract:In this paper,the structure and depth distribution of pure iron ion-implanted with titanium and nitrogen,were studied by XRD and XPS were described.Then the hardness and friction resistance were introduced.The experimental results show that new phase were introduced by co-implantation of Ti~+ and N~+,the material properties were greatly improved.Meanwhile,we get the best implantation dose.
Engineering,Materials Science
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