Nonlinear Vibration Analysis of Microcantilevers in Atomic Force Microscopy

HU Qingquan,TANG Qian,CHEN Liqun
DOI: https://doi.org/10.3321/j.issn:1000-7857.2007.22.007
2007-01-01
Abstract:Nonlinear vibration is analyzed for microcantilevers with the Lennard-Jones interaction potential.Based on the governing equation derived with Galerkin method,the near-resonant amplitude-frequency response is obtained by the method of multiple scales.The periodical motion is determined by the amplitude-frequency response.
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