Abstract:With the development of the radio frequency technique, the explosive growth of transmitted data in 5G era puts higher requirements on surface acoustic wave (SAW) filter bandwidth. In this work, 15°YX-LiNbO3(LN)/SiO2/Si multilayer structure was proposed, where both LN and SiO2 films possess uniform thickness and the interfaces between films are quite clear. With hierarchical cascading algorithm, the spurious resonance that resulted from Rayleigh mode was minimized through the modulation of Cu electrode thickness. One-port resonators measurement results confirm a high electromechanical coupling coefficient of shear horizontal mode ranging from 22.5% to 25.2%. Furthermore, a ladder-type filter with a center frequency of 1279 MHz and a large fractional bandwidth of 20.2% was successfully fabricated. Excellent bandpass filtering properties were achievable with minimum insertion loss of 0.8 dB and in-band fluctuation less than 0.9 dB. Multilayer structure SAW filters also exhibited a temperature coefficient of frequency of -57.7 ppm/°C and a power durability of 33 dBm, which are both significant improvements compared with that of devices built on bulk 15°YX-LN substrate. This work provides an effective solution for wideband and low-loss radio frequency filters in 5G communication systems, suitable for large-scale application and commercial promotion.

Technique for Low-Loss and Wideband Surface Acoustic Wave Filters

Saw Filter With Insertion Loss Of 2db And Fractional Bandwidth Of 30 Percent

A triple-mode ring dielectric resonator band-pass filter using substrate integrated waveguide (SIW)

Substrate Integrated Waveguide Filter with Flat Passband Based on Complex Couplings

Design of Ultra-Wideband Surface Acoustic Wave Filters

Near 30% Fractional Bandwidth Surface Acoustic Wave Filters with Novel Electrode Configuration

An Ultra-Wideband Filtering Hybrid Ring Coupler with Super Wide Upper Stopband

Wideband Low-Loss Filter with Compact Size and Wide Stopband Based on Folded Planar Waveguide

Wideband and Low-Loss Surface Acoustic Wave Filter Based on 15° YX-LiNbO₃/SiO₂/Si Structure

Ultra-Wideband Surface Acoustic Wave Filters Based on the Cu/LiNbO 3 /sio 2 /sic Structure

A Low-Loss Wideband SAW Filter with Low Drift Using Multilayered Structure

Low-Loss and Wide-Band Double-Mode Surface Acoustic Wave Filters Using Pitch-Modulated Interdigital Transducers and Reflectors

Low-Loss and Constant-Group-Delay Surface Acoustic Wave Filters Employing Cu-Based Resonant Single-Phase Unidirectional Transducers

New graphic method design of wideband frequency selective surfaces embedded within dielectric layers

A Wideband Transmission Frequency Selective Surface Rasorber with Low Insertion Loss

Ultra-Wideband Surface Acoustic Wave Devices Using Cu-Grating/Rotated-Yx-Linbo3-Substrate Structure

Ultra-Wideband Filtering 180° Hybrid Coupler with Super Wide Upper Stopband Using Swap Phase Inverter and Electromagnetic Bandgap Structures on Double-Sided Parallel-Strip Line

Wideband Surface Acoustic Wave Filter at 3.7 GHz With Spurious Mode Mitigation

Design Of Low Loss Surface Acoustic Wave Filter With Three Interdigital Transducers

A Wideband Mixer Designed with Low Conversion Loss Through the Entire W-Band

Design of Narrow Bandwidth Elliptic-Type SAW/BAW Filters