Quantitative Research on Higher Order Harmonic Suppression in 17~33 Nm with Different Thickness A1 Filters

ZHOU Hong-jun,ZHONG Peng-fei,ZHENG Jin-jin,HUO Tong-lin,ZHANG Guo-bin,QI Ze-ming
DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.07.004
2007-01-01
Abstract:With 840 l/mm transmission grating(made in house) behind the exit of Spherical Grating Monochromator(SGM) in Spectral Radiation Standard and Metrology(U27) beamline,the dispersion of exit beam and the contributions of different orders were analyzed.The results of higher order harmonics suppression by different thickness Al filters were given in the region of 17~33 nm.The results show that when the thickness of Al filter is 400 nm,and the wavelength between 17~33 nm,the contributions of higher orders to the detector signal are restricted to less than 2%,and the Photon Diode(PD) intensity is strong enough.After being corrected by quantum efficiency of the PD detector,the higher order contributions are less than 0.6%,which is important for calibration absolute reflectivities of multilayer and detector.
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