Quantitative Research on Higher Order Harmonics in Metrology Beamline

Hongjun Zhou,Jinjin Zheng,Tonglin Huo,Guobin Zhang,Zeming Qi,Pengfei Zhong

DOI: https://doi.org/10.1007/s11460-008-0021-7

2008-01-01

Frontiers of Electrical and Electronic Engineering in China

Abstract:The synchrotron radiation spectra of the spherical grating monochromator (SGM) working in the soft X-ray and VUV region are often contaminated by significant amounts of higher order harmonics. They cannot be suppressed completely by suitable filters. Higher order contributions in the spectral radiation standard and metrology beamline were researched using transmission grating (made in-house) and IRD AXUV100G (USA) photodiode detector. The exit beam was dispersed with the transmission grating behind the exit slit of the monochromator, and the contributions of the different orders were analyzed. The higher order distributions were quantitatively determined for three gratings with line densities of 1800, 600 and 200 l/mm. Experiment results show that in wavelengths between 5 nm and 15 nm the contributions of the higher orders to the detector signal are restricted to less than 7% even without the use of filters. In wavelength regions between 5 nm and 34 nm, the contributions of the higher orders to the detector signal are less than 14% with proper A1, Si 3 N 4 and Zr filters, and after being modified by quantum efficiency of the detector, the higher order contributions are restricted to less than 6.5%. The study also shows that higher orders are almost totally suppressed by MgF 2 filter when the wavelength ranges between 115–140 nm.