Pneumatic pressure control of large caliber optical polishing system

Wang Kai,Lv Ke,Shi Weiren,Li Jiangbo
DOI: https://doi.org/10.3969/j.issn.0254-3087.2013.03.008
2013-01-01
Abstract:In order to improve the processing technology of large caliber optical polishing equipment,based on the end actuator with the planet type rotational structure,a kind of high precision,high stability pneumatic pressure control system is proposed in this paper,which solves the pneumatic key technical problem in the overall system design.From the point of view of overall system design,the operation principle of the actuator and the effect of different parameters of the pneumatic section on the system control are analyzed,which can guide the design of the pressure control system.Using pressure sensor,proportional valve and multiple group double modal PID control algorithm,the closed-loop pressure control system was constructed to realize high precise,high stable polishing pad pressure control.The experimental results show that the pneumatic pressure control system can meet the pressure design requirements of large caliber optical polishing system.
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