Probe with new holographic optical element (NHOE)

Zheng'an Wang,Shengli Li,Taiyi Jin
DOI: https://doi.org/10.1016/S0143-8166(97)00065-1
IF: 5.666
1997-01-01
Optics and Lasers in Engineering
Abstract:A new holographic optical probe is presented in this paper. With the help of a new holographic optical element, two beams reflected from different spots of the sample surface are received by the same detector. Based on the principle of self-compensation, the influence of the possible inclination of the sample surface is reduced. NHOE, made by the computer-generated hologram (CGH) technology, combines more optical functions than already developed HOE does. Since the probe only takes several elements, it has the advantages of small size, light weight and low cost. It can be used in the high-precision measurement system.
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