Study on Humidity Sensing Property Based on Li-doped Mesoporous Silica MCM-41

Lijie Wang,Di Li,Rui Wang,Yuan He,Qi,Yue Wang,Tong Zhang
DOI: https://doi.org/10.1016/j.snb.2008.03.028
2008-01-01
Abstract:Pure and LiCl-doped mesoporous silica MCM-41 with different doping concentrations (1, 2, 5, 10 and 15wt.%) have been prepared. XRD, IR spectra and SEM characterized the materials. These different characterization results suggest that these materials have the similar mesoporous structure. A resistive-type humidity sensor was fabricated on a ceramic substrate with Ag–Pd interdigital electrodes. The humidity sensing properties of the sensors were investigated at different frequencies. The studies revealed that the LiCl-doping was beneficial for improving the humidity sensing properties of the samples. The sample with 2wt.% LiCl dopant has the best sensing properties to humidity. Finally, a possible mechanism is suggested to explain the humidity-sensitive properties.
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