Study on the influence of YB_2C_3O_(7-x) thin film on the total pressure by the single source liquid delivering MOCVD

Jing Tongguo,Gao Lei,Xu Yaxin,Wang Xibin,Xue Yan,Xiong Jie,Tao Bowan
DOI: https://doi.org/10.3969/j.issn.1001-7100.2012.04.006
2012-01-01
Abstract:In this paper,YBa2Cu3O7-x superconducting thin films were deposited on the Y2O3/YSZ/CeO2(YYC)buffered Ni-W_at 5% films by Metal Organic Chemical Vapor Deposition(MOCVD).Optimized single source liquid delivering equipment was used for continuous and stable supply of the metal organic source.With the total gas pressure of 380Pa,O2 and N2O partial pressure of 200Pa,high quality YBCO film was obitained and its critical current density Jc reached 0.2MA/cm2.Compared to the FWHM values of out-of-plane and in-plane of CeO2 and subsquent YBCO,YBCO films were significantly improved.
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