Sensitive Detection of Infrared Photons Using A High-Q Microcantilever

Zhang Fengxin,Zhu Yinfang,Yang Jinling,Cao Lixin
DOI: https://doi.org/10.1088/1674-4926/32/9/094010
2011-01-01
Journal of Semiconductors
Abstract:A new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force. The irradiating light is modulated into sinusoidal and pulsed waves, and to be in-phase and anti-phase with the cantilever driving signal. A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed. Under a vacuum of 10(-4)Pa, an infrared light power of 7.4 nW was detected with the cantilever. The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.
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