UV Detector Based on MgZnO Films Prepared by PLD Method

HU Juguang,DIAO Xionghui,LI Xuejin,LIN Xiaodong,LI Youguo,LIU Yi,LONG Jinghua,LI Qiwen
DOI: https://doi.org/10.3969/j.issn.1004-1699.2011.03.004
2011-01-01
Abstract:MgZnO films were prepared with KrF excimer pulsed laser deposition(PLD)method on quartz substrate at 300 ℃~600 ℃.Films were characterized using Raman spectroscopy,AFM,and UV/Vis spectrophotometer.The results show that the film prepared at 600 ℃ has the largest band gap of 3.78 eV,and best crystal quality.Al electrode was deposited on the film to make a UV sensor.I-V curve,spectral response and time response under 365 nm UV irradiation characteristics were detected.The results show that,the response peak is at about 320 nm,the rising response time constant is 9.1 ms,falling time is 16.5 ms.
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