Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography

Yifu Ding,Hyun Wook Ro,Jack F. Douglas,Ronald L. Jones,Daniel R. Hine,Alamgir Karim,Christopher L. Soles
DOI: https://doi.org/10.1002/adma.200601998
IF: 29.4
2007-01-01
Advanced Materials
Abstract:The decay kinetics of polystyrene (PS) gratings are monitored by tracking the intensity of the first-order laser diffraction peak as a function of annealing time. For low-molecular-mass PS (24 kg mol(-1), blue circles), an exponential response suggests that the pattern decay is a surface-tension driven viscous flow. In high-molecular-mass PS (1007 kg mol(-1), green circles) a complicated response includes a rapid elastic recovery, a power-law creep, and a viscouslike flow (see figure).
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