Abstract:A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investigated experimentally based on an electrostatically suspended micromachined gyroscope. In order to eliminate the negative spring effect inherent in the gyroscope dynamics, a stiffness compensation scheme was utilized in design of the decoupled rebalance loop to ensure loop stability and increase suspension stiffness. The experimental results show an overall stiffness increase of 30.3% after compensation. A decoupling method comprised of inner- and outer-loop decoupling compensators is proposed to minimize the cross-axis coupling error. The inner-loop decoupling compensator aims to attenuate the angular position coupling. The experimental frequency response shows a position coupling attenuation by 14.36 dB at 1 Hz. Moreover, the cross-axis coupling between the two angular rate output signals can be attenuated theoretically from −56.2 dB down to −102 dB by further appending the outer-loop decoupling compensator. The proposed dual-loop decoupling compensation algorithm could be applied to other dual-axis spinning-rotor gyroscopes with various suspension solutions.

Compact Hinfinity robust rebalance loop controller design for a micromachined electrostatically suspended gyroscope.

Compact robust rebalance loop controller design for a micromachined electrostatically suspended gyroscope

Robust H 8 controller design for linear uncertain systems with delayed state and control

Robust Hinfinity Controller Design for Time-Varying Uncertain Linear Systems with Time-Varying State and Control Delays

H∞/μ Robust Control of Vibration for an Ultra-precision Grinding Machine

Robust Control of High Speed High Precision Linear Motion System

H<sub>∞</sub>/μ Robust Control of Vibration for an Ultra-Precision Grinding Machine

Rebalance Loop Design of Micromachined ESG

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

H∞ controller for an active magnetic ball levitation system

Design of rebalance loop for an electrostatically suspended micromachined gyroscope

Closed loop control design for the sense mode of micromachined vibratory gyroscopes

Robust Proportional-Differential Control Via Eigenstructure Assignment for Active Magnetic Bearings-Rigid Rotor Systems

Robust Control of Magnetic Bearing with Gyroscopic Effects Using Output Feedback Controller

Robust Controller Design Using the Nevanlinna-Pick Interpolation in Gyro Stabilized Pod

System-level simulation of levitation control for a micromachined electrostatically suspended gyroscope

Adaptive levitation control using single neuron for micromachined electrostatically suspended gyroscope

Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension

Robust Magnetic Bearing Control Using Stabilizing Dynamical Compensators

Model Reference Adaptive Compensation and Robust Controller for Magnetic Bearing Systems With Strong Persistent Disturbances