Research on the Function of G-M Refrigerator's Secondary Seal Used for Cryopump

SHEN Cheng-zhong,ZHANG Ya-fei
DOI: https://doi.org/10.13385/j.cnki.vacuum.2011.04.017
IF: 4
2011-01-01
Vacuum
Abstract:Cryopump is one kind of high vacuum pump that has high pumping speed,and without contamination.Its application becomes wider and wider recently.Most modern commercial cryopump use G-M refrigerator as the cryogenic source.In this paper G-M refrigerator's secondary seal was studied experimetally.The results showed that when the temperature is below 80K,the heat capacity of secondary heat storage material decreases,and the secondary seal will be work to reduce the thermal loss.
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