Preparation and Characterization of Polyimide/Fluorinated Silicate Nano-Hybrid Thin Films with Low Refractive Indices

Yulai Han,Junji Wakita,Shigeki Kuroki,Xiaogong Wang,Shinji Ando
DOI: https://doi.org/10.2494/photopolymer.21.143
2008-01-01
Journal of Photopolymer Science and Technology
Abstract:-octylsilane (13FTES) andtetraethoxysilane (TEOS) were employed to prepare the silicate precursors. Furthermore,2-aminopropyl triethoxysilane (APrTEOS) was used as a coupling agent to improve thecompatibility between the polymeric and inorganic domains of the nano-hybrid materials.The chemical structures of organo-silicate and hybrid materials were examined with solidstate
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