Abstract:The densification of vertically-aligned carbon nanotube arrays into solid-like coatings is highly desirable for certain applications, including those requiring increased robustness or hardness, protection from oxygen at high temperatures and other damaging ambients, or increased effective thermal conductance. Chemical vapor infiltration (CVI) is a technique that essentially extends the commonly-used chemical vapor deposition process to the filling of networks of pores within a fibrous preform by altering the deposition kinetics toward a mass-transfer limited process. In this study, the CVI technique was utilized for filling the space around carbon nanotubes in vertically-aligned arrays on SiO2 substrates with a novel but simple approach. Nanotube growth was conducted using a vapor phase catalyst delivery method in a chemical vapor deposition chamber at 770 degC with a mixture of xylene and ferrocene vapors. Once the nanotube growth had ended, the conditions were altered to initiate the infiltration of carbon-containing species into the nanotube array, resulting in carbon deposition on the nanotubes. The extent of infiltration and location of the remaining porosity was determined using SEM analysis and microbalance measurements, for infiltration times up to 10 hours. The type of C-C bonding within the densified films was elucidated using Raman scattering. Vickers microhardness measurements were made to determine the hardness of carbon-densified nanotube arrays. These studies were largely motivated by the anticipated use of carbon nanotubes for on-chip thermal management on wide bandgap high-power semiconductor devices, optical devices, MEMS structures, and nanoscaled electronics

Carbon infiltration of carbon-fiber preforms by catalytic CVI

Preparation and characterization of carbon felt/carbon composites by chemical vapor infiltration process

Improvement of Chemical Liquid Vaporized Infiltration Process for Fast Densification of Carbon/Carbon Composites

Properties of Carbon Nano-Tubes–cf/sic Composite by Precursor Infiltration and Pyrolysis Process

Rapid Chemical Vapor Infiltration of C/C Composites

Preparation of C/C Composites by Thermal Gradient Chemical Vapor Infiltration with Vaporized Kerosene As a Precursor

Improvement of Film Boiling Chemical Vapor Infiltration Process for Fabrication of Large Size C/C Composite

Effect of chemical vapor infiltration on the flexural properties of C/C-SiC composites prepared by the precursor infiltration pyrolysis method

Fabrication and Characteristics of Carbon Nanofiber-Reinforced Carbon/Carbon Composites by Fast Catalytic Infiltration Processes

Research on Structures and Properties of C/C Composites Using the Preparation of HCVI

Kinetics of thermal gradient chemical vapor infiltration of large-size carbon/carbon composites with vaporized kerosene

PROGRESS OF RESEARCH ON PREPARATION OF CARBON/CARBON COMPOSITE MATERIAL BY THE CHEMICAL LIQUID VAPOR INFILTRATION METHOD

Process Optimization of C/C Composites Fabrication with Multi-physics Fields CVI

Effects of Carbon Fiber Architecture on the Microstructure and Mechanical Property of C/C-SiC Composites

Progress in Catalytic Preparation of Carbon/Carbon Composites

Study on C/C composites modified by in-situ vapor-grown carbon nanofibers

A Numerical Study of Densification Behavior of Silicon Carbide Matrix Composites in Isothermal Chemical Vapor Infiltration

Fabrication of ACF/CNT Composites by CVD Method

Densified Vertically-Aligned Carbon Nanotube Arrays by Chemical Vapor Infiltration

Deposition Kinetics and Mechanism of Pyrocarbon for Electromagnetic-Coupling Chemical Vapor Infiltration Process

Effect of carbon fiber preform with variable density on the oxidation behavior of C/C composites