INFLUENCE OF AMMONIA ON THE NANOSTRUCTURES OF Ni NANO-FILMS

Zhao Yong,Cheng Guoan,Zheng Ruiting,Liu Huaping,Liang Changlin,Zhang Meng
DOI: https://doi.org/10.3321/j.issn:0476-0301.2005.06.010
2005-01-01
Abstract:The influence of ammonia treatment on the nanostructures of nickel catalyst films is studied.The nickel films are prepared by metal vapor vacuum arc(MEVVA) plasma deposition system on SiO_2/Si or Si substrate.It is found that the nanostructures of nickel particles are depended on the factors such as the processing time of ammonia,film thickness and the processing temperature.The appropriate processing time of ammonia and the processing temperature are the key factors to obtain highly dense,small and uniform Ni nano-particles.SiO_(2) layer has the effects of preventing the chemical combination between nickel and silicon during the processing period.The influence of ammonia on Ni nano-films is briefly discussed.
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