Effect of Structure of Aluminum Film by Magnetron Sputtering on Micro-Pores Formed on 316L Stainless Steel by Anodizing

GUO Guang-wei,PANG Li-xia,MA Xin-xin,TANG Guang-ze,WANG Yu-jiang
DOI: https://doi.org/10.13289/j.issn.1009-6264.2010.12.022
2010-01-01
Abstract:Aluminum films with different morphology and structure were deposited on 316L stainless steel by unbalanced DC magnetron sputtering at various substrate biases.Micro-pores were fabricated on the surface of 316L stainless steel substrate by anodizing.The morphology and structure of Al films were investigated,and its effect on the micro-pores forming was studied.The formation mechanism of micro-pores was analyzed by anodic polariztion process.It is indicated that when the Al films deposited on the surface of 316L stainless steel substrate are compact with fine grains,the micro-pores formed on the substrate display regular shape with small aperture and dense distribution,which are more applicable for biomedical materials.And Al films with considerable cavity result in large irregular pores with a sparse distribution.
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