Abstract:The effects of optical resonance and near field in the interaction of transparent particles on a substrate with laser light have been examined experimentally and theoretically. It is found that pits can be created at the contacting point between the particle and the metallic surface by laser irradiation (KrF,λ=248 nm) with a single pulse. The influence of the particle size and the laser fluence on the structuring of the surface has been investigated. The size of the particle ranges from 1.0 μm to 140 nm in diameter. The morphologies of the holes created have been characterized by an atomic force microscope and a scanning electron microscope. For constant laser fluence, the created hole is sensitive to the particle size. For higher-laser fluence, the corresponding hole becomes larger and deeper. With a low fluence of 300 mJ/cm2 and for 140 nm particles, the lateral dimensions of created pits can be down to 30 nm. With a high fluence of 750 mJ/cm2 and 1.0 μm particles, the diameter and the depth of created holes are about 350 and 100 nm, respectively. Theoretical calculations and an accurate solution of a boundary problem indicate that incident light could excite some resonance modes inside the particle and produce enhanced light intensities on the contacting area (substrate surface). The light intensity on the contacting area is nonuniform and sensitive to the particle size parameter. Experimental results are explained and are very consistent with those of theoretical calculations. The experimental results also provide direct evidence of the optical resonance and near-field effects in the interaction of transparent particles on the substrate with laser light.

Laser Assisted Surface Nanopatterning

Nano-Patterning by Pulsed Laser Irradiation in Near Field

Pulsed-laser Assisted Nanopatterning of Metallic Layers Combined with Atomic Force Microscopy

Sub-50 Nm Nanopatterning of Metallic Layers by Green Pulsed Laser Combined with Atomic Force Microscopy

Nanostructure Fabrication Using Pulsed Lasers Combined with Scanning Probes

Surface Nano-fabrication by Laser Precision Engineering

Nanostructuring of Semiconductor Materials and Metallic Thin Films Using Femtosecond Laser and Scanning Probe Microscope

Nanoscale Material Redistribution Induced by Spatially Modulated Femtosecond Laser Pulses for Flexible High-Efficiency Surface Patterning.

Pulsed Laser-Assisted Surface Structuring with Optical Near-Field Enhanced Effects

Laser-Assisted Nanoprocessing and Growth of Semiconductor Nanostructures

Nanostructuring with Scanning Probe Microscope Tip Irradiated with Femtosecond Laser

Near-Field Nanomodification of Thin Films Using Femtosecond Laser and Atomic Force Microscope

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Surface Nanostructuring by Nano-/Femtosecond Laser-Assisted Scanning Force Microscopy

Micron-scale Modifications Ofsisurface Morphology by Pulsed-Laser Texturing

Solution-Phase Photochemical Nanopatterning Enabled by High-Refractive-Index Beam Pen Arrays

Femtosecond Laser Aperturless Near-Field Nanomachining of Metals Assisted by Scanning Probe Microscopy

Nanostructures fabricated on metal surfaces assisted by laser with optical near-field effects

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

Mechanism of Near-Field Optical Nanopatterning on Noble Metal Nano-Films by a Nanosecond Laser Irradiating a Cantilevered Scanning Near-Field Optical Microscopy Probe.

Nanoscale molecular patterns fabricated by using scanning near-field optical lithography.