Abstract:The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd's mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd's mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.

Diffraction Gratings: Part 2

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Diffraction Properties of Transmission Binary Blazed Grating

RESEARCH ON THE DIFFRACTION EFFICIENCY OF GRATING FOR THE SECOND SCALAR ANALYSIS METHOD

Diffraction Property of Tapered Grating

Fabrication of a Two-Dimensional Diffraction Grating by a Two-Axis Lloyd's Mirror Interferometer

High-index-contrast Subwavelength Grating Reflectors and Filters

Diffraction efficiency management by complex binary gratings

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

Study on Diffraction, Anti-reflection and Transmission Enhancement of Subwavelength Relief Gratings

Efficient Bragg Diffraction in Thin Semiconductor Two-Dimensional Gratings.

Generalized Space-Time-Periodic Diffraction Gratings: Theory and Applications

SURFACE-COVERED 1×3 GRATING WITH DIELECTRIC-METAL SLABS UNDER SECOND BRAGG INCIDENCE

Two-dimensional binary phase gratings for zero-order and high-order diffraction suppression

Diffraction Polarization Characteristics for Blazed Reflection Gratings

Asymmetric Diffraction Based On A Passive Parity-Time Grating

Adaptive finite-element method for diffraction gratings.

Design and fabrication of soft x-ray blazed diffraction gratings

Calculation of Diffraction Efficiencies of A Grating Made on A Thick Transparent Plate

High-efficiency Metallic Diffraction Gratings for Laser Applications.

Diffraction Gratings for X-ray Spectroscopy