Chemical toxic agents sensor based on surface acoustic wave resonator with hyperbranched polymer membrane

ZHU Ji,GAO Shi,JI Xiao-jun,ZUO Guo-min,HAN Tao,CHENG Zhen-xing
DOI: https://doi.org/10.3969/j.issn.1000-9787.2009.02.032
2009-01-01
Abstract:Gas sensor based on surface acoustic wave(SAW) technology is needed to be improved in the detection limit,the response time and the reduction of temperature and humidity sensitivity.A dual-port SAW resonator coated with hyperbranched polymer membrane is introduced.By the establishment of Van Dyke model,the impacts of the sensitive polymer membrane on Q-value and insertion loss of chemical agent sensor as well as on circuit impedance matching are analyzed.Meanwhile,research is done to find out the impact of the location of membrane coating on the device,and the experiment result shows that coating on the center grating between interdigital transducers(IDT) has relatively best effects.The design and features of hyperbranched polymer are also introduced.Experiments are done on the sensor.By exposed to Sarin agent of 5.0 mg/m3,a 315 MHz dual-port SAW resonator coated with hyperbranched polymer membrane is applied.Experiments show that the sensitivity of the sensor can be achieved 600 Hz/mg/m3,the response time is 50 s,and recovery time is about 60 s.
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