Effects of assembly errors of dual-flexure beams on stiffness of flexure-based accelerometer

LIU Xiao-yuan,LIU Hai-bin,JIA Jian-yuan,CHEN Gui-min
DOI: https://doi.org/10.3969/j.issn.1005-6734.2013.05.018
2013-01-01
Abstract:The detecting mass was supported by two identical flexible beams in the flexure-based accelerometer. Based on static equilibrium equations and the deformation compatibility condition, the analytic equations of assembly errors and superposition stiffnesses of dual-beam structure were modeled. The results of the finite element and the analytical ones were in good agreement, in which the maximum errors of the analytical results and the finite element results were less than 5%. Based on the analytical equations, the effects of assembly errors on the stiffness of the flexure-based structure along the sensitive axis were studied. When Δx=15 μm, the superposition stiffnesse increased 1.42% than that of the ideal assembly; the superposition stiffnesse increased 5.31% as Δy=8 μm; and the superposition stiffnesse increased slightly(less than 0.001%) while Δφ=0.012 rad. The results indicate that the effect of Δy on the superposition stiffnesse is maximum, and the effect of Δφ is minimum. The dual flexible beams are not coplanar is the principal factor that induces the increase of the superposition stiffness.
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