Characterization of Ultrathin Conductive Films Using a Simplified Approach for Terahertz Time-Domain Spectroscopic Ellipsometry

Masaya Nagai,Sou Watanabe,Ryosuke Imamura,Masaaki Ashida,Kohei Shimoyama,Haobo Li,Azusa N. Hattori,Hidekazu Tanaka
DOI: https://doi.org/10.1007/s10762-024-01011-x
2024-09-13
Journal of Infrared Millimeter and Terahertz Waves
Abstract:We present two ideas to simplify the measurement and analysis of terahertz time-domain spectroscopic ellipsometry data of ultrathin films. The measurement is simplified by using a specially designed sample holder with mirrors, which can be mounted on a cryostat. It allows us to perform spectroscopic ellipsometry by simply inserting the holder into a conventional terahertz spectroscopy system for measurements in transmission geometry. The analysis of the obtained data is simplified by considering a single interface with a certain sheet conductivity (since the film thickness is significantly smaller than the wavelength of the terahertz light). We demonstrate the application of these ideas by evaluating the sheet conductivities of two perovskite rare-earth nickelate thin films in the temperature range 78–478 K. The use of this particular analytical method and the sample holder design will help to establish terahertz time-domain spectroscopic ellipsometry as a characterization technique for ultrathin films.
engineering, electrical & electronic,optics,physics, applied
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