Abstract:Spectroscopic ellipsometry is a high-precision and powerful optical characterization technique, which can be categorized into two fundamental types of standard and generalized ellipsometry. The latter can obtain the complete Jones matrix to investigate various anisotropic samples. However, terahertz generalized ellipsometry has traditionally relied on frequency-domain instrumentation, which is limited in bandwidth, complicated in polarization manipulation, and slow in operation. In this study, we propose a highly accurate and efficient terahertz time-domain generalized ellipsometer based on a polarization beam coupler-splitter configuration. It measures four independent complex spectra in real-time without mechanical movement, providing ultrahigh data throughput. Each polarizer-antenna unit constructively superimposes their filtering effect, resulting in a 45–65 dB extinction ratio that approaches the system dynamic range. The superb illumination and detection linearity provides an outstanding polarization accuracy and eliminates the need for complicated calibration. Reflection characterization of the magneto-optical properties of an InAs wafer demonstrates the generalized ability to simultaneously obtain multiple dielectric functions. Transmission ellipsometric imaging of liquid crystals subjected to an inhomogeneous electric field further highlights the excellent efficiency. The proposed technique significantly expands the capabilities of terahertz spectroscopy, paving ways to anisotropic materials, in situ monitoring, and polarization-sensitive devices.

Terahertz Bessel Beam Applied to Thickness Measurement of Ellipsometry Methods

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