The Growth and Superhydrophobicity of a Perfluorocarbon Nanoneedle Array on an SiO/sub 2/ Surface

Yanjun Tang,Xiaohe Xu,Ji Fang,Yu Liang,Hai-Feng Ji
DOI: https://doi.org/10.1109/tnano.2006.877018
2006-01-01
IEEE Transactions on Nanotechnology
Abstract:Alternate employment of etching gas (SF6) and deposition gas (C4F8) on an unpolished SiO2 surface in an inductive coupling plasma system generates a perfluorocarbon nanoneedle array at low pressure and at ambient temperature. The nanoneedle averages 300 nm in diameter and the nanoneedle surface has a large water contact angle of 171 degrees. The superhydrophobicity of the perfluorocarbon nanoneedle surface may be used in many industrial and biological processes.
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