Motion Controller for the Atomic Force Microscopy Based Nanomanipulation System

Ruiguo Yang,Ning Xi,King Wai Chiu Lai,Bingtuan Gao,Hongzhi Chen,Chanmin Su,Jian Shi
DOI: https://doi.org/10.1109/iros.2009.5353921
2011-01-01
Abstract:Nanomanipulation with Atomic force microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this multiple input single output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device.
What problem does this paper attempt to address?