Abstract:Undesired unintentional doping and doping limits in semiconductors are typically caused by compensating defects with low formation energies. Since the formation energy of a charged defect depends linearly on the Fermi level, doping limits can be especially pronounced in wide bandgap semiconductors where the Fermi level can vary substantially. Introduction of non-equilibrium carrier concentrations during growth or processing alters the chemical potentials of band carriers and thus provides the possibility of modifying populations of charged defects in ways impossible at thermal equilibrium. Herein we demonstrate that, for an ergodic system with excess carriers, the rates of carrier capture and emission involving a defect charge transition level rigorously determine the admixture of electron and hole quasi-Fermi levels determining the formation energy of non-zero charge states of that defect type. To catalog the range of possible responses to excess carriers, we investigate the behavior of a single donor-like defect as functions of extrinsic doping and energy of the charge transition level. The technologically most important finding is that excess carriers will increase the formation energy of compensating defects for most values of the charge transition level in the bandgap. Thus, it may be possible to overcome limitations on doping imposed by native defects. Cases also exist in wide bandgap semiconductors in which the concentration of defects with the same charge polarity as the majority dopant is either left unchanged or actually increases. The causes of these various behaviors are rationalized in terms of the capture and emission rates and guidelines for carrying out experimental tests of this model are given.

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