Design, synthesis and thermal stability study on graded TiN O solar selective absorbing coating fabricated by pulsed DC reactive magnetron sputtering

Liu Chaoying,Sun Zhiqiang,He Feng,Zhang Hebin,Ma Juanrong

DOI: https://doi.org/10.1016/j.matchar.2021.110921

IF: 4.537

2021-03-01

Materials Characterization

Abstract:Design, synthesis and characterization of a solar selective absorbing coating based on titanium oxynitride are reported in this contribution. All the layers were deposited by reactive magnetron sputtering in a horizontal in-line sputtering system. The optical constants of individual layers were obtained by spectroscopic ellipsometry measurement and fitting. Multilayer solar selective absorbing coating including, from substrate to air interface, Al infrared reflective layer/ (TiN x /TiN x1O y1/TiN x2O y2) composite absorbing layer/SiO2:Al antireflective layer were then designed and and fabricated based on their optical properties and thickness optimization. A solar absorptance (α) of 94.6% and thermal emittance (ε) of 3.8% for operation temperature of 100 °C were obtained by analyzing the measured spectra data. Combined with X-ray diffraction and scanning electron microscopy, the relevance between the thermal stability and crystal structure and morphology of the film after annealed at 250 °C and 400 °C in air was explored

materials science, multidisciplinary,metallurgy & metallurgical engineering, characterization & testing