Abstract:A hard x-ray nanoprobe beamline is being developed at the Advanced Photon Source (APS). The beamline will house a hard x-ray nanoprobe instrument, one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials (CNM) being constructed at Argonne National Laboratory (ANL). The nanoprobe instrument will operate with photon energies between 3 keV and 30 keV with 30-nm special resolution. Imaging and spectroscopy at this resolution level require staging of x-ray optics and specimens with a mechanical repeatability of better than 10 nm [1]. The instrument will combine a scanning probe mode with a full-field transmission mode. It uses x-ray fluorescence for trace-element mapping and spectroscopy; x-ray diffraction to obtain local structural information such as crystallographic phase, strain texture, and x-ray transmission in phase; and absorption to image internal structures of complex devices. The high-precision positioning mechanisms for the nanoprobe presented here consist of the following major component groups: a granite base with vibration isolators, an optomechanical instrument vacuum chamber, a robotic detector manipulator for microdiffraction, an in situ optical microscope, and a translation-stage system for a transmission imaging detector [2]. Precision positioning mechanisms for a differential scanning stage system with active vibration control in nanometer scale are also presented in this paper. *This work was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. W-31-109-ENG-38. References: [1] J. Maser, G. B. Stephenson, D. Shu, B. Lai, S. Vogt, A. Khounsary, Y. Li, C. Benson, G. Schneider, SRI 2003, AIP Conf. Proc. 705, (2004) 470-473. [2] D. Shu, J. Maser, B. Lai, S. Vogt, M. Holt, C. Preissner, A. Smolyanitskiy, B. Tieman, R. Winarski, and G. B. Stephenson, to be published in the proceedings of X-ray Microscopy 2005, Himeji, Japan, July 2005.

Nm-scale spatial resolution X-ray imaging with MLL nanofocusing optics: Instrumentational requirements and challenges

Nm-scale Spatial Resolution X-Ray Imaging with MLL Nanofocusing Optics: Instrumentational Requirements and Challenges

Instrument for nm-scale spatial resolution x-ray microscopy using MLL optics

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Design and Performance of an X-ray Scanning Microscope at the Hard X-ray Nanoprobe Beamline of NSLS-II.

Recent Advances in Nano-Scale Spatial Resolution X-Ray Microscopy Instrumentation at NSLS-II

Conceptual Design for A Beamline for A Hard X-Ray Nanoprobe with 30 Nm Spatial Resolution

A Versatile High-Speed X-Ray Microscope for Sub-10 Nm Imaging

X-ray Microscopy with the NSLS Soft X-ray Undulator

Performance and Characterization of the Prototype Nm-Scale Spatial Resolution Scanning Multilayer Laue Lenses Microscope.

Design For An X-Ray Nanoprobe Prototype With A Sub-10-Nm Positioning Requirement

High Precision Positioning Mechanisms for a Hard X-ray Nanoprobe Instrument*

Implementation of Soft X-Ray Microscopy with Several Tens Nanometers Spatial Resolution at NSRL

Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

Lab-scale soft x-ray ptychography: advanced nanoscale imaging and beam diagnostics

X-Ray Phase Contrast and Fluorescence Nanotomography for Material Studies

Soft X-ray Holography at NSRL

Structure probing by holographic imaging at nanometer scale with X-ray lasers (SPHINX)

Hard X-Ray Full Field Nano-Imaging of Bone and Nanowires at Ssrl

High-resolution soft X-ray emission spectrograph at advanced light source

Three Dimensional Imaging of Biological Samples and Nano-materials Using Soft X-ray Microscopy