Abstract: Linear super-resolution microscopy via synthesis aperture approach permits fast acquisition because of its wide-field implementations, however, it has been limited in resolution because a missing spatial-frequency band occurs when trying to use a shift magnitude surpassing the cutoff frequency of the detection system beyond a factor of two, which causes ghosting to appear. Here, we propose a method of chip-based 3D nanoscopy through large and tunable spatial-frequency-shift effect, capable of covering full extent of the spatial-frequency component within a wide passband. The missing of spatial-frequency can be effectively solved by developing a spatial-frequency-shift actively tuning approach through wave vector manipulation and operation of optical modes propagating along multiple azimuthal directions on a waveguide chip to interfere. In addition, the method includes a chip-based sectioning capability, which is enabled by saturated absorption of fluorophores. By introducing ultra-large propagation effective refractive index, nanoscale resolution is possible, without sacrificing the temporal resolution and the field-of-view. Imaging on GaP waveguide material demonstrates a lateral resolution of lamda/10, which is 5.4 folds above Abbe diffraction limit, and an axial resolution of lamda/19 using 0.9 NA detection objective. Simulation with an assumed propagation effective refractive index of 10 demonstrates a lateral resolution of lamda/22, in which the huge gap between the directly shifted and the zero-order components is completely filled to ensure the deep-subwavelength resolvability. It means that, a fast wide-field 3D deep-subdiffraction visualization could be realized using a standard microscope by adding a mass-producible and cost-effective spatial-frequency-shift illumination chip.

Performance and Characterization of the Prototype Nm-Scale Spatial Resolution Scanning Multilayer Laue Lenses Microscope.

Wide-field 3D Nanoscopy on Chip Through Large and Tunable Spatial-Frequency-shift Effect

Wide-field 3D nanoscopy on chip through large and tunable spatial-frequency-shift effect

Design and performance of a scanning ptychography microscope

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Recent Advances in Nano-Scale Spatial Resolution X-Ray Microscopy Instrumentation at NSLS-II

Nm-scale Spatial Resolution X-Ray Imaging with MLL Nanofocusing Optics: Instrumentational Requirements and Challenges

X-ray focusing with efficient high-NA multilayer Laue lenses

A Versatile High-Speed X-Ray Microscope for Sub-10 Nm Imaging

Design and Performance of an X-ray Scanning Microscope at the Hard X-ray Nanoprobe Beamline of NSLS-II.

X-Ray Nanometer Focusing at the Ssrf Based on A Multilayer Laue Lens

Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science

Instrument for nm-scale spatial resolution x-ray microscopy using MLL optics

X-Ray Phase Contrast and Fluorescence Nanotomography for Material Studies

Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

Three-dimensional Adaptive Optical Nanoscopy for Thick Specimen Imaging at Sub-50-nm Resolution.

3D Adaptive Optical Nanoscopy for Thick Specimen Imaging at sub-50 nm Resolution

X‐Ray Multibeam Ptychography at up to 20 keV: Nano‐Lithography Enhances X‐Ray Nano‐Imaging

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer