Abstract:Hard X‐ray multibeam ptychography paves the path toward high‐resolution, non‐destructive 3D imaging of mm‐sized samples. The present study describes the achievement of imaging of 0.1mm+ samples using up to 12 parallel uniquely coded X‐ray beams with energies of up to 20 keV. Cutting‐edge laser technology enables 3D printing of a high aspect ratio lens array for hard X‐ray parallel focusing. Hard X‐rays are needed for non‐destructive nano‐imaging of solid matter. Synchrotron radiation facilities (SRF) provide the highest‐quality images with single‐digit nm resolution using advanced techniques such as X‐ray ptychography. However, the resolution or field of view is ultimately constrained by the available coherent flux. To address this, the beam's incoherent fraction can be exploited using multiple parallel beams in an X‐ray multibeam ptychography (MBP) approach. This expands the domain of X‐ray ptychography to larger samples or more rapid measurements. Both qualities favor the study of complex composite or functional samples, such as catalysts, energy materials, or electronic devices. The challenge of performing ptychography at high energy and with many parallel beams must be overcome to extract the full advantages for extended samples while minimizing beam attenuation. Here, that challenge is overcome by creating a lens array using cutting‐edge laser printing technology and applying it to perform scanning with MBP with up to 12 beams and at photon energies of 13 and 20 keV. This exceeds the measurement limits of conventional hard X‐ray ptychography without compromising image quality for various samples: Siemens star test pattern, Ni/Al2O3 catalyst, microchip, and gold nano‐crystal clusters.

Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science

X-ray microscopy instrumentation developments at NSLS-II: recent progress and future directions

Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Nanoscale chemical imaging with structured X-ray illumination

High-Resolution Scanning X-ray Diffraction Microscopy

X-ray multibeam ptychography at up to 20 keV: nano-lithography enhances X-ray nano-imaging

Coherent x-ray magnetic imaging with 5 nm resolution

X‐Ray Multibeam Ptychography at up to 20 keV: Nano‐Lithography Enhances X‐Ray Nano‐Imaging

Three-dimensional Multi-Color Optical Nanoscopy at Sub-10-nm Resolution Based on Small-Molecule Organic Probes.

Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography

In situ hard X-ray transmission microscopy for material science

Soft X-ray phase nano-microscopy of micrometre-thick magnets

Imaging Atomic-Scale Chemistry from Fused Multi-Modal Electron Microscopy

Multimodal imaging of cubic Cu2O@Au nanocage formation via galvanic replacement using X-ray ptychography and nano diffraction

Three-dimensional Hard X-ray Ptychographic Reflectometry Imaging on Extended Mesoscopic Surface Structures

Hard x-ray grazing-incidence ptychography: large field-of-view nanostructure imaging with ultra-high surface sensitivity

The nanoscale imaging of the bulk polycrystalline material with the effects of depth of field and field of view based on x-ray free electron laser

Soft X-Ray Phase Nanomicroscopy of Micrometer-Thick Magnets

Super-resolution Hyper-Spectral Imaging for the Direct Visualization of Local Bandgap Heterogeneity

Fast Atomic-Scale Chemical Imaging of Crystalline Materials and Dynamic Phase Transformations.

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics