Impact of Buried Gate Oxide on the Electrical Performance of Negative Capacitance FinFETs: Design Perspectives

Vibhuti Chauhan,Dip Prakash Samajdar
DOI: https://doi.org/10.1007/s12633-024-02906-z
IF: 3.4
2024-02-17
Silicon
Abstract:Superior gate electrostatics and dominating control over short-channel effects (SCEs) set the Negative Capacitance Fin Field-Effect Transistor (NC-FinFET) apart from conventional devices. However, advancements in device performance through various engineering strategies have prompted further progress in NC-FinFET technology. This work modifies the depth of the Gate Oxide (GO) layer and provides a novel spacer NC-FinFET design. Utilizing TCAD Sentaurus, a comprehensive study of device performance characteristics followed by varying the GO thickness intended for burying within the channel is explored. A comparative analysis is performed between the conventional, and DE spacer and novel dual Ferroelectric-Dielectric (FE-DE) spacer NC-FinFETs based on diverse DC, SCE and mixed-mode parameters. Furthermore, by submerging the complete GO depth within the channel, the impact of side GO thickness is examined to achieve optimal configuration. Last but not least, the possibility of burying GO thickness appears as a key driver for developing low-power physics.
materials science, multidisciplinary,chemistry, physical
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